Fig. 4
Image resolution for a SiC film as a function of the total dose-rate, N2 pressure and temperature. The displays show FFTs of high-resolution TEM images of the partially crystalline SiC film (Additional file 1: Fig. S2). The image resolution is denoted for each condition and corresponds to the lattice fringes with the highest spatial frequency (as indicted by a dashed circle). Images were acquired at two different temperatures of 40 and 400 °C. At 5 and 15 mbar N2, the displays are cropped to show the left and right half of the FFTs of the full images acquired at 40 and 400 °C, respectively. The illumination diameter was fixed as 100 nm for the lowest total dose-rate, resulting in a constant areal dose-rate of 1600 e−/(Å2s). The same areal dose-rate was used also for the higher total dose-rates