Fig. 3

Electron probe intensity profiles. The electron probes were calculated using the aberrations values tabulated in Table 1 that were obtained from Nion’s Ronchigram aberration correction method [10]. The intensity profiles were obtained along the x-axis. The corrected probe (red line) corresponds to the intensity profile for the aberration-corrected electron probe shown in Fig. 2a, while the aberrated probe (black line) is the intensity profile of the C₃₄-aberrated electron probe shown in Fig. 2c