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Fig. 6 | Advanced Structural and Chemical Imaging

Fig. 6

From: Deceleration of probe beam by stage bias potential improves resolution of serial block-face scanning electron microscopic images

Fig. 6

Normalized detector backscatter signal in arbitrary units for fixed detector gain and offset. The open circles show the normalized response of the FEI CBS detector as a function of electron energy without any sample biasing. The open squares show the normalized response of the Gatan backscatter detector as a function of electron energy without sample biasing. The filled diamonds show the normalized response of the CBS detector with 3-keV gun-acceleration voltage and deceleration voltages sufficient to achieve 1- and 1.5-keV landing energy. The closed triangles show the normalized response of the CBS detector for 4-keV acceleration voltage and deceleration voltages sufficient to achieve 1- and 1.5-keV landing energies. The results at 1-keV landing energy show an improvement of ×16.5 in signal for 3-keV column-electron energy and a ×23.6 increase in signal for 4-keV column-electron energy. The results at 1.5-keV landing energy show an improvement in backscattered signal of ×4.5 with 3-keV column-electron energy, and a ×6.5 increase in signal at 4-keV column-electron energy

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