Skip to main content
Fig. 9 | Advanced Structural and Chemical Imaging

Fig. 9

From: Deceleration of probe beam by stage bias potential improves resolution of serial block-face scanning electron microscopic images

Fig. 9

Calculation of the trajectories of the scattered electrons for BSEs (blue) and SEs (green) in a biasing field. Trajectories are plotted for electrons scattered from a point on the surface equally distributed through an angle of 0°–70° from the beam axis. a 3-keV gun-accelerating voltage with a −1.5-keV decelerating potential, resulting in a 1.5-keV beam-electron-landing energy. b 4.5-keV gun-accelerating voltage with a −3-keV decelerating potential, resulting in a 1.5-keV beam-electron-landing energy. The simulation matches well with the observed signal in the various rings of the CBS detector as a function of applied bias voltage

Back to article page