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Table 1 Numerical aberration coefficients measured in this study for the Si\(_3\)N\(_4\), graphene grain boundary and silicon wedge experimental datasets

From: Automatic software correction of residual aberrations in reconstructed HRTEM exit waves of crystalline samples

Order CEOS Si\(_3\)N\(_4\) Graphene Si Wedge
m n Name \(C^x\) \(C^y\) \(C^x\) \(C^y\) \(C^x\) \(C^y\)
0 2 \(A_1\) 0.7 2.0 4.0 −4.7 0.0 2.0 nm
0 3 \(A_2\) −5.2 66.5 60.1 −112 −15.3 −35.7 nm
1 1 \(B_2\) 10.4 67.6 −123 −79.8 23.0 84.8 nm
0 4 \(A_3\) 0.6 0.2 −5.6 −2.8 −1.4 −1.6 μm
1 2 \(S_3\) −1.5 0.0 −3.4 4.3 1.0 −1.4 μm
0 5 \(A_4\) 0.7 −4.6 −26.3 31.2 −7.9 5.6 μm
1 3 \(D_4\) −6.7 −15.0 −26.1 18.7 8.6 12.6 μm
2 1 \(B_4\) 31.7 −47.8 99.2 55.7 −5.0 −30.3 μm
0 6 \(A_5\) −1.4 0.3 −0.8 −3.1 0.0 0.0 mm
1 4 \(R_5\) −0.2 -0.3 1.1 0.6 0.0 0.2 mm
2 2 \(S_5\) 2.6 −0.2 0.5 −1.9 −0.6 0.5 mm