Table 1 Numerical aberration coefficients measured in this study for the Si\(_3\)N\(_4\), graphene grain boundary and silicon wedge experimental datasets
Order | CEOS | Si\(_3\)N\(_4\) | Graphene | Si Wedge | ||||
|---|---|---|---|---|---|---|---|---|
m | n | Name | \(C^x\) | \(C^y\) | \(C^x\) | \(C^y\) | \(C^x\) | \(C^y\) |
0 | 2 | \(A_1\) | 0.7 | 2.0 | 4.0 | −4.7 | 0.0 | 2.0 nm |
0 | 3 | \(A_2\) | −5.2 | 66.5 | 60.1 | −112 | −15.3 | −35.7 nm |
1 | 1 | \(B_2\) | 10.4 | 67.6 | −123 | −79.8 | 23.0 | 84.8 nm |
0 | 4 | \(A_3\) | 0.6 | 0.2 | −5.6 | −2.8 | −1.4 | −1.6 μm |
1 | 2 | \(S_3\) | −1.5 | 0.0 | −3.4 | 4.3 | 1.0 | −1.4 μm |
0 | 5 | \(A_4\) | 0.7 | −4.6 | −26.3 | 31.2 | −7.9 | 5.6 μm |
1 | 3 | \(D_4\) | −6.7 | −15.0 | −26.1 | 18.7 | 8.6 | 12.6 μm |
2 | 1 | \(B_4\) | 31.7 | −47.8 | 99.2 | 55.7 | −5.0 | −30.3 μm |
0 | 6 | \(A_5\) | −1.4 | 0.3 | −0.8 | −3.1 | 0.0 | 0.0 mm |
1 | 4 | \(R_5\) | −0.2 | -0.3 | 1.1 | 0.6 | 0.0 | 0.2 mm |
2 | 2 | \(S_5\) | 2.6 | −0.2 | 0.5 | −1.9 | −0.6 | 0.5 mm |