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Fig. 1 | Advanced Structural and Chemical Imaging

Fig. 1

From: Analysis of crystal defects by scanning transmission electron microscopy (STEM) in a modern scanning electron microscope

Fig. 1

a Scheme of Helios Nanolab G4 FX dual-beam instrument with double-tilt holder for TEM specimens, STEM detector, through-the-lens detector (TLD), retractable on-axis CCD camera, and FIB column. b Top view of multi-segmented STEM detector with bright-field (BF), four narrow annular dark field (ADF), and high-angle annular dark-field (HAADF) segments. The positions of Bragg reflections for GaN in \(\left[ {10\overline{1} 0} \right]\) zone axis at 30 keV are indicated

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