Fig. 14

PCA results for the STEM XEDS spectrum-image of a high-k stack in a CMOS device: a scree plot, b anisotropy plot. The inset in (b) shows the zoomed variation of the anisotropy criterion in the noise domain; c compares the elemental maps extracted from the untreated and the PCA treated datasets. For fair comparison, all maps are displayed with identical contrast settings