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Table 1 Composition of layers (phases) constituting the investigated CMOS device

From: Optimal principal component analysis of STEM XEDS spectrum images

Phase notation Composition (at.%)
Si 100% Si
SiO-A 33% Si–67% O
SiO-B 29% Si–57% O–14% N
HfO 33% Hf–67% O
TiN-A 50% Ti–50% N
TiN-B 50% Ti–40% N–10% O
TiN-C 45% Ti–45% N–10% Al
TaN 50% Ta–50% N
Al 80% Al–20% Ti
AlO 40% Al–60% O
SiN 43% Si–57% N